Ozone electronic, ozone applications in semiconductor

• Electronics

Ozone effectively converts a wide range of organic molecules to carbon dioxide and water. Any excess ozone readily decomposes to oxygen making this an effective, environmentally friendly oxidant for the semiconductor manufacturing industry.

Ozone applications in semiconductor manufacturing include:

• Surface cleaning
• Photoresist stripping
• Metal and particle removal
• Disinfection

Download a technical article on ozone cleaning in semiconductor industry